Thermistor element and electromagnetic wave sensor
AssigneeTDK Corporation
InventorsMaiko KOKUBO, Shinji Hara, Naoki Ohta, Susumu Aoki
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AssigneeTDK Corporation
InventorsMaiko KOKUBO, Shinji Hara, Naoki Ohta, Susumu Aoki
Estimating the term…
A thermistor element includes: a thermistor film formed of an oxide having a spinel crystal structure; a first surface-side electrode provided in contact with a first surface of the thermistor film; and a second surface-side electrode provided in contact with a second surface of the thermistor film, wherein the first surface-side electrode includes a first electrode and a second electrode, and at least a part of the first electrode and at least a part of the second electrode are disposed to overlap the second surface-side electrode, and in the thermistor film, an oxygen concentration of a second region between the first electrode and the second electrode in a plan view is higher than that of a first region consisting of a region that overlaps the first electrode and the second surface-side electrode and a region that overlaps the second electrode and the second surface-side electrode.
A thermistor element comprising:
Dependencies are inferred from the claim text.