An apparatus for real-time in-situ simultaneous measurement of temperature and mechanical parameters, comprising a charge type vibration sensing module comprising a charge type vibration sensor having a temperature compensation function and a plurality of thermocouples, a temperature/vibration coplanarly-integrated wireless surface acoustic wave (SAW) sensing module comprising a temperature/vibration coplanarly-integrated SAW sensor and a packaging housing, and a processor, wherein
- the charge type vibration sensing module and the temperature/vibration coplanarly-integrated wireless SAW sensing module are both connected to the processor;
- and
- the thermocouples are arranged on the charge type vibration sensor having a temperature compensation function;
- the charge type vibration sensor having a temperature compensation function is connected to the processor;
- the charge type vibration sensor having a temperature compensation function comprises a supporting base, a plurality of first mass blocks, and a plurality of piezoelectric substrates;
- the supporting base comprises a supporting prism and a base;
- and the supporting prism and the base are integrally arranged;
- the plurality of first mass blocks are respectively arranged on prism surfaces of the supporting prism;
- the thermocouples are arranged on the first mass blocks;
- the first mass blocks each are provided with a groove;
- a pre-tightening ring is arranged in the groove;
- and the pre-tightening ring fixes the piezoelectric substrate between the first mass block and the prism surface of the supporting prism;
- the temperature/vibration coplanarly-integrated wireless SAW sensing module comprises a temperature/vibration coplanarly-integrated SAW sensor and a packaging housing;
- the temperature/vibration coplanarly-integrated SAW sensor comprises a temperature sensor, a pressure sensor, a piezoelectric cantilever beam, a cantilever beam fixing base, and a second mass block;
- one end of the piezoelectric cantilever beam is a fixed end, and the fixed end is fixed to the cantilever beam fixing base;
- the other end of the piezoelectric cantilever beam is a free end, and the second mass block is arranged at the free end;
- the temperature sensor is arranged at the fixed end;
- the pressure sensor is arranged at a position where a stress is maximum between the fixed end and the free end;
- and an inversely F-shaped sawtooth antenna is arranged on the packaging housing;
- and
- the processor are configured to execute operations comprising:
- determining a sensitivity of the charge type vibration sensing module or the temperature/vibration coplanarly-integrated wireless SAW sensing module at a temperature T based on an output variation of the charge type vibration sensing module or the temperature/vibration coplanarly-integrated wireless SAW sensing module and a detected vibration quantity;
- determining a relative variation when the charge type vibration sensing module or the temperature/vibration coplanarly-integrated wireless SAW sensing module is affected only by temperature and a variation output quantity when the charge type vibration sensing module or the temperature/vibration coplanarly-integrated wireless SAW sensing module is affected by both temperature and vibration;
- and
- determining an output quantity of the charge type vibration sensing module or the temperature/vibration coplanarly-integrated wireless SAW sensing module based on the relative variation when the charge type vibration sensing module or the temperature/vibration coplanarly-integrated wireless SAW sensing module is affected only by temperature, the variation output quantity when the charge type vibration sensing module or the temperature/vibration coplanarly-integrated wireless SAW sensing module is affected by both temperature and vibration, the sensitivity, and the vibration quantity obtained by real-time monitoring.