Negative-type photosensitive polymer, polymer solution, negative-type photosensitive resin composition, cured film, and semiconductor device
AssigneeSumitomo Bakelite Co., Ltd.
InventorsKeita IMAI, Akihiko OTOGURO, Kazuya NAKASHIMA
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Abstract
A negative-type photosensitive polymer of the present invention is a solvent-soluble negative-type photosensitive polymer which has a structural unit containing an imide ring, the negative-type photosensitive polymer containing a group having a terminal double bond, in which an average value of positive electric charges (δ+) of two carbonyl carbons of the imide ring is equal to or less than 0.099 as calculated by a charge equilibration method.
Claims19
A solvent-soluble negative-type photosensitive polymer which has a structural unit containing an imide ring, the negative-type photosensitive polymer comprising
- a group having a terminal double bond,
- wherein an average value of positive electric charges (δ+) of two carbonyl carbons of the imide ring is equal to or less than 0.099 as calculated by a charge equilibration method.
Dependencies are inferred from the claim text.