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US 2024/0290568 A1Published application
X-ray tube, x-ray generator, and method for producing window member
AssigneeHamamatsu Photonics K.K.
InventorsNaonobu SUZUKI, Atsushi ISHII, Ryosuke YABUSHITA, Akimichi SHIMIZU, Naofumi KOSUGI, Ginji SUGIURA
Life of this patent
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Abstract
An X-ray tube includes a housing, an electron gun that emits an electron beam inside the housing, a target that generates an X-ray upon an incidence of the electron beam inside the housing, and a window member that seals an opening of the housing and that transmits the X-ray. The window member is formed in a plate shape from a single crystal diamond. A [100] direction of the single crystal diamond is in an intersection relationship with a thickness direction of the window member at an angle of less than 45 degrees.
Claims14
1:
- An X-ray tube comprising:
- a housing;
- an electron gun that emits an electron beam inside the housing;
- a target that generates an X-ray upon an incidence of the electron beam inside the housing;
- and
- a window member that seals an opening of the housing and that transmits the X-ray,
- wherein the window member is formed in a plate shape from a single crystal diamond, and
- a [100] direction of the single crystal diamond is in an intersection relationship with a thickness direction of the window member at an angle of less than 45 degrees.
5 more elements
2:
- The X-ray tube according to claim 1,
- wherein a [010] direction and a [001] direction of the single crystal diamond are in an intersection relationship with a plane perpendicular to the thickness direction of the window member at an angle of less than 45 degrees.
3:
- The X-ray tube according to claim 1,
- wherein the window member has a first surface opposite to an interior of the housing, and
- the [100] direction of the single crystal diamond is in an intersection relationship with a direction perpendicular to the first surface at an angle of less than 45 degrees.
4:
- The X-ray tube according to claim 1,
- wherein the window member is attached to an attachment surface of the housing around the opening, and
- the [100] direction of the single crystal diamond is in an intersection relationship with a direction perpendicular to the attachment surface at an angle of less than 45 degrees.
5:
- The X-ray tube according to claim 1,
- wherein the window member has a second surface on an interior side of the housing, and
- the target is formed on the second surface.
6:
- The X-ray tube according to claim 5,
- wherein the [100] direction of the single crystal diamond is in an intersection relationship with a direction of the incidence of the electron beam on the target at an angle of less than 45 degrees.
7:
- The X-ray tube according to claim 1,
- wherein the [100] direction of the single crystal diamond is in an intersection relationship with the thickness direction of the window member at an angle of 0.1 degrees to 7 degrees.
8:
- An X-ray generation device comprising:
- the X-ray tube according to claim 1;
- and
- a power supply part that applies a voltage to the electron gun.
1 more element
9:
- A method for manufacturing a window member, the method comprising:
- a first forming step of forming a single crystal diamond substrate having a (100) plane as a major surface through an epitaxial growth;
- and
- an extraction step of extracting a window member having a plate shape from the single crystal diamond substrate,
- wherein in the extraction step, the window member is extracted from the single crystal diamond substrate such that a [100] direction of a single crystal diamond intersects a thickness direction of the window member at an angle of less than 45 degrees.
2 more elements
10:
- A method for manufacturing a window member, the method comprising:
- a preparation step of preparing a seed substrate having a major surface that is in an intersection relationship with a (100) plane at an angle of less than 45 degrees;
- a first forming step of forming a single crystal diamond substrate on the major surface of the seed substrate through an epitaxial growth;
- and
- an extraction step of extracting a window member having a plate shape from the single crystal diamond substrate by performing cutting along a direction perpendicular to a thickness direction of the single crystal diamond substrate.
2 more elements
11:
- The method for manufacturing a window member according to claim 9, further comprising:
- a second forming step of forming a target on one surface of the window member in the thickness direction, the target configured to generate an X-ray upon an incidence of an electron beam.
12:
- The method for manufacturing a window member according to claim 9,
- wherein the [100] direction of the single crystal diamond is in an intersection relationship with the thickness direction of the window member at an angle of 0.1 degrees to 7 degrees.
13:
- The method for manufacturing a window member according to claim 10, further comprising:
- a second forming step of forming a target on one surface of the window member in the thickness direction, the target configured to generate an X-ray upon an incidence of an electron beam.
14:
- The method for manufacturing a window member according to claim 10,
- wherein the [100] direction of the single crystal diamond is in an intersection relationship with the thickness direction of the window member at an angle of 0.1 degrees to 7 degrees.