Exposure method, exposure device, and method of forming optically-anisotropic layer
AssigneeFUJIFILM Corporation
InventorsHirotoshi ANDO, Takehiko HARASAWA, Satoshi NAGANO, Yasuhiro SEKIZAWA
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Abstract
An object is to provide an exposure method and an exposure device for obtaining a photo-alignment film where the accuracy of an alignment pattern is high, and a method of forming an optically-anisotropic layer. In a case where linearly polarized light is focused in a ring shape with an optical member and a film including a compound having a photo-aligned group is exposed, while rotating a polarization direction of the polarized light, the film and the optical member are relatively moved in a direction tilted with respect to an optical axis of the optical member.
Claims20
An exposure method comprising:
- focusing linearly polarized light in a ring shape with an optical member and exposing a film including a compound having a photo-aligned group,
- wherein while rotating a polarization direction of the linearly polarized light,
- the film and the optical member are relatively moved in a direction tilted with respect to an optical axis of the optical member.
An exposure method comprising:
- focusing linearly polarized light in a ring shape with an optical member and exposing a film including a compound having a photo-aligned group,
- wherein while rotating a polarization direction of the linearly polarized light, and
- the film and the optical member are relatively moved in an optical axis direction of the optical member in a state where a normal line of the film is tilted with respect to an optical axis of the optical member.
An exposure method comprising:
- focusing linearly polarized light in a ring shape with an optical member and exposing a film including a compound having a photo-aligned group,
- wherein the linearly polarized light is incident into the optical member from a direction tilted with respect to an optical axis of the optical member, and
- while rotating a polarization direction of the linearly polarized light,
- the film and the optical member are relatively moved in the incidence direction of the linearly polarized light into the optical member.
Dependencies are inferred from the claim text.