Pressure sensor with contact detection of the deflection of the membrane, pressure sensor system and method for generating a pressure signal

A micromechanical pressure sensor element for capturing a pressure sensor signal, using capacitive pressure capture, comprising:

• a first membrane movable based on an applied pressure;
• a first cavity located below the first membrane with a cavity bottom, wherein a pressure of a medium applied to the first membrane bends the first membrane in a direction of the cavity bottom;
• at least one first contact element which is directly or indirectly connected to the first membrane;
• and
• at least one second contact element which is directly or indirectly connected to the cavity bottom;
• wherein an establishment of an electrical contact between the first and the second contact element is effected based on a specified first pressure being applied to the first membrane.

A pressure sensor system, comprising:

• at least one micromechanical pressure sensor element for capturing a pressure sensor signal, using capacitive pressure capture, including:
• a first membrane movable based on an applied pressure,
• a first cavity located below the first membrane with a cavity bottom, wherein a pressure of a medium applied to the first membrane bends the first membrane in a direction of the cavity bottom,
• at least one first contact element which is directly or indirectly connected to the first membrane, and
• at least one second contact element which is directly or indirectly connected to the cavity bottom,
• wherein an establishment of an electrical contact between the first and the second contact element is effected based on a specified first pressure being applied to the first membrane;
• and
• a second micromechanical pressure sensor element, including:
• a second membrane movable based on an applied pressure,
• a second cavity located below the second membrane, with a cavity bottom, wherein a pressure of a medium applied to the second membrane bends the second membrane in a direction of the cavity bottom of the second cavity, and the second micromechanical pressure sensor element,
• at least one third contact element which is directly or indirectly connected to the second membrane, and
• a fourth contact element which is directly or indirectly connected to the cavity bottom of the second cavity,
• wherein electrical contact is made between the third and fourth contact elements based on a specified third pressure applied to the membrane.

A method for generating a pressure sensor signal using at least one pressure sensor element or a pressure sensor system including the at least one pressure sensor element, wherein the pressure sensor element includes:

• at least one movable membrane which exhibits a movement based on a pressure;
• at least one first contact element which is directly or indirectly connected to the movable membrane;
• and
• at least one second contact element which establishes an electrical contact with the first contact element upon a predetermined movement of the membrane;
• wherein the method includes at least two operating modes, the method comprising:
• in a first operating mode, generating the pressure sensor signal based on a first pressure-dependent movement of the at least one membrane;
• and
• in a second operating mode, generating the pressure sensor signal based on a detected electrical contact and a second pressure-dependent movement of the at least one membrane.