Superalloy Target
AssigneesOerlikon Surface Solutions AG, PfäFfikon, Plansee Composite Materials GmbH
InventorsPeter POLCIK, Jurgen RAMM
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Abstract
A superalloy target wherein the superalloy target has a polycrystalline structure of random grain orientation, the average grain size in the structure is smaller than 20 μm, and the porosity in the structure is smaller than 10%. Furthermore, the invention includes a method of producing a superalloy target by powder metallurgical production, wherein the powder-metallurgical production starts from alloyed powder (s) of a superalloy and includes the step of spark plasma sintering (SPS) of the alloyed powder (s).
Claims13
A superalloy target made by powder metallurgical production wherein
- the superalloy target has a polycrystalline structure of random grain orientation,
- the average grain size in the structure is smaller than 20 μm,
- the porosity in the structure is smaller than 10%,
- a proportion of a fcc crystal structure is in a range of 80 to 99%, wherein
- the superalloy is a Ni-based superalloy with nickel as a main metallic component, comprising at least one element of Cr, Fe, Co, Mo, W, Ta, Al, Ti, Zr, Nb, Re, Y, V, C, B, and Hf as an alloying element.
Dependencies are inferred from the claim text.