Electromagnetic wave detection element and electromagnetic wave sensor having the same
AssigneeTDK Corporation
InventorsSusumu AOKI, Shinji HARA, Naoki OHTA, Maiko KOKUBO
Life of this patent
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Abstract
An electromagnetic wave detection element has: an electromagnetic wave detection portion; a conductive layer that is electrically connected to the electromagnetic wave detection portion; a conductive pillar having an end surface that is electrically connected to the conductive layer, wherein the end surface includes an inner region that is in contact with the conductive layer and an outer region that is positioned outside the inner region; and a dielectric layer that is positioned between at least a part of the outer region and the conductive layer.
Claims10
An electromagnetic wave detection element comprising:
- an electromagnetic wave detection portion;
- a conductive layer that is electrically connected to the electromagnetic wave detection portion;
- a conductive pillar having an end surface that is electrically connected to the conductive layer, wherein the end surface includes an inner region that is in contact with the conductive layer and an outer region that is positioned outside the inner region;
- and
- a dielectric layer that is positioned between at least a part of the outer region and the conductive layer.
Dependencies are inferred from the claim text.