Method of manufacturing semiconductors using fluid delivery system
AssigneeIchor Systems, Inc.
InventorsChris MELCER, Philip Ryan BARROS, Haruyuki KUBOTA, Randolph TREUR, Todd Mark CUSHMAN
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Abstract
A method of manufacturing a substrate block for a fluid delivery system is disclosed. First, a mold is provided, the mold having a cavity. The cavity of the mold is filled with a fluoropolymer to form a substrate block having an upper surface. A curved insert is withdrawn from the cavity to form a substrate fluid passageway extending from an inlet substrate port to an outlet substrate port. The substrate fluid passageway extends between the inlet substrate port and the outlet substrate port in a smooth arc free of corners or angular walls.
Claims20
A method of manufacturing a substrate block comprising:
- providing a mold, the mold comprising a cavity;
- filling the cavity of the mold with a fluoropolymer to form a substrate block having an upper surface;
- withdrawing a curved insert to form a substrate fluid passageway extending from an inlet substrate port to an outlet substrate port, the substrate fluid passageway extending between the inlet substrate port and the outlet substrate port in a smooth arc free of corners or angular walls.
A method of manufacturing a substrate block comprising:
- providing a mold, the mold comprising a cavity and a curved insert within the cavity;
- filling the cavity of the mold with a fluoropolymer to form a substrate block having an upper surface;
- withdrawing the curved insert to form a substrate fluid passageway extending from an inlet substrate port to an outlet substrate port, each of the inlet substrate port and the outlet substrate port formed into the upper surface of the substrate block.
A method of manufacturing a substrate block comprising:
- providing a mold, the mold comprising a cavity and a curved insert within the cavity;
- filling the cavity of the mold with a fluoropolymer to form a substrate block having an upper surface;
- withdrawing the curved insert to form a substrate fluid passageway extending from an inlet substrate port to an outlet substrate port, the inlet substrate port comprising an inlet port axis and a conical portion symmetric about the inlet port axis, the conical portion having a height measured in a direction parallel to the inlet port axis which varies about the inlet port axis.
Dependencies are inferred from the claim text.