Semiconductor manufacturing device and semiconductor manufacturing method
AssigneeSamsung Electronics Co., Ltd.
InventorsKEN OZAWA, Kenji Suzuki, Shinji Ueyama
Life of this patent
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Abstract
A semiconductor manufacturing device includes a detection unit that detects an extinction response of a perpendicular magnetic anisotropy PMA film in a sample from a polar Kerr effect signal, and a derivation unit that derives an anisotropic magnetic field (Hk) of the PMA film by extrapolating and fitting the detected extinction response, in magneto-optical Kerr effect measurement that uses a plurality of electromagnets that electrically apply magnetic fields to the sample on the stage by convert a perpendicular magnetic field that includes a vertical component normal to an upper surface of a stage, and a horizontal magnetic field parallel to the upper surface of the stage.
Claims21
A semiconductor manufacturing device for a magneto-optical Kerr effect measurement, comprising:
- a plurality of electromagnets that electrically switch between a first magnetic field that has a component perpendicular to an upper surface of a stage upon which a sample is placed, and a second magnetic field that has a component parallel to the upper surface of the stage;
- a detecting unit that detects an extinction response of a perpendicular magnetic anisotropy film in the sample from a polar Kerr effect signal;
- and
- a derivation unit that derives an anisotropic magnetic field of the perpendicular magnetic antisotropy film by extrapolating and fitting the detected extinction response.
17-32. (canceled)
A semiconductor manufacturing device for a magneto-optical Kerr effect measurement, comprising:
- a detecting unit that detects an extinction response of a perpendicular magnetic anisotropy film in a sample from a polar Kerr effect signal in a magneto-optical Kerr effect measurement that uses a plurality of electromagnets that electrically switch between applying a first magnetic field and a second magnetic field to the sample on a stage, wherein the magnetic field includes a vertical component normal to an upper surface of the stage and the second magnetic field includes a horizontal component parallel to the upper surface of the stage;
- and
- a derivation unit that derives an anisotropic magnetic field of the perpendicular magnetic anisotropy film by extrapolating and fitting the detected extinction response.
Dependencies are inferred from the claim text.