US 2024/0268152 A1Published application

Display device, display module, electronic device, and method for manufacturing display device

AssigneeSemiconductor Energy Laboratory Co., Ltd.

InventorsShunpei YAMAZAKI, Shinya SASAGAWA, Ryota HODO, Kentaro SUGAYA, Yoshikazu HIURA, Takahiro FUJIE, Yasuhiro JINBO

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Abstract

A display device with high display quality is provided. The display device includes a plurality of light-emitting devices each including a pixel electrode, a light-emitting layer, a functional layer, a common layer, and a common electrode in this order and includes an insulating layer positioned between side surfaces of the light-emitting layers adjacent to each other. The light-emitting layer and the functional layer each having an island shape are provided in each light-emitting device, and the plurality of light-emitting devices share the common layer. The common layer and the common electrode are provided to cover the insulating layer. In a cross-sectional view, an end portion of the insulating layer has a tapered shape with a taper angle greater than 0° and less than 90°.

Claims29

Dependent claims

A display device comprising:

a first light-emitting device comprising a first pixel electrode, a first light-emitting layer over the first pixel electrode, and a common electrode over the first light-emitting layer;
a second light-emitting device comprises a second pixel electrode, a second light-emitting layer over the second pixel electrode, and the common electrode over the second light-emitting layer;
a first insulating layer;
and
a second insulating layer,
wherein the first insulating layer covers a side surface and part of a top surface of the first light-emitting layer and a side surface and part of a top surface of the second light-emitting layer,
wherein the second insulating layer overlaps with the part of the top surface of the first light-emitting layer and the part of the top surface of the second light-emitting layer through the first insulating layer,
wherein the second insulating layer comprises a portion between the side surface of the first light-emitting layer and the side surface of the second light-emitting layer,
wherein the common electrode covers the second insulating layer,
wherein an end portion of the second insulating layer has a tapered shape with a taper angle greater than 0° and less than 90° in a cross-sectional view,
wherein the first light-emitting layer comprises a first region and a second region outside the first region,
wherein the first region is between the first pixel electrode and the common electrode,
wherein the second region and at least one of the first insulating layer and the second insulating layer overlap each other, and
wherein a width of the second region is greater than or equal to 1 nm and is less than or equal to 50% of a width of the first region.

11 more elements

A display device comprising:

a first light-emitting device comprising a first pixel electrode, a first light-emitting layer over the first pixel electrode, a first functional layer over the first light-emitting layer, a common layer over the first functional layer, and a common electrode over the common layer;
a second light-emitting device comprising a second pixel electrode, a second light-emitting layer over the second pixel electrode, a second functional layer over the second light-emitting layer, the common layer over the second functional layer, and the common electrode over the common layer;
a first insulating layer;
and
a second insulating layer,
wherein the first insulating layer covers a side surface and part of a top surface of the first light-emitting layer, a side surface and part of a top surface of the second light-emitting layer, a side surface and part of a top surface of the first functional layer, and a side surface and part of a top surface of the second functional layer,
wherein the second insulating layer overlaps with the side surface and the part of the top surface of the first light-emitting layer, the side surface and the part of the top surface of the second light-emitting layer, the side surface and the part of the top surface of the first functional layer, and the side surface and the part of the top surface of the second functional layer through the first insulating layer,
wherein the second insulating layer comprises a portion between the side surface of the first light-emitting layer and the side surface of the second light-emitting layer,
wherein the common layer covers the second insulating layer,
wherein the common electrode covers the second insulating layer with the common layer therebetween,
wherein an end portion of the second insulating layer has a tapered shape with a taper angle greater than 0° and less than 90° in a cross-sectional view, and
wherein the first functional layer, the second functional layer and the common layer comprise the same material.

9 more elements

A display device comprising:

a first light-emitting device comprising a first pixel electrode, a first light-emitting layer over the first pixel electrode, a first functional layer over the first light-emitting layer, a common layer over the first functional layer, and a common electrode over the common layer;
a second light-emitting device comprising a second pixel electrode, a second light-emitting layer over the second pixel electrode, a second functional layer over the second light-emitting layer, the common layer over the second functional layer, and the common electrode over the common layer;
a first insulating layer;
a second insulating laver;
and
a third insulating layer,
wherein the first insulating layer comprises an organic compound,
wherein the first insulating layer covers a side surface and part of a top surface of the first light-emitting layer, a side surface and part of a top surface of the second light-emitting layer, a side surface and part of a top surface of the first functional layer, and a side surface and part of a top surface of the second functional layer,
wherein the second insulating layer overlaps with the side surface and the part of the top surface of the first light-emitting layer, the side surface and the part of the top surface of the second light-emitting layer, the side surface and the part of the top surface of the first functional layer, and the side surface and the part of the top surface of the second functional layer through the first insulating layer,
wherein the third insulating layer overlaps with the side surface and the part of the top surface of the first light-emitting layer, the side surface and the part of the top surface of the second light-emitting layer, the side surface and the part of the top surface of the first functional layer, and the side surface and the part of the top surface of the second functional layer through the first insulating layer and the second insulating layer,
wherein the third insulating layer comprises a portion between the side surface of the first light-emitting layer and the side surface of the second light-emitting layer,
wherein the common layer covers the third insulating layer,
wherein the common electrode covers the third insulating layer with the common layer therebetween, and
wherein in a cross-sectional view, an end portion of the third insulating layer has a tapered shape with a taper angle greater than 0° and less than 90°.

11 more elements

A method for manufacturing a display device, comprising:

forming a first pixel electrode and a second pixel electrode;
forming a first film over the first pixel electrode and the second pixel electrode;
forming, over the first film, a first mask film that is an insulating film;
forming, over the first mask film, a second mask film that is a metal film or an alloy film;
forming, over the second mask film, a first resist mask overlapping with the first pixel electrode;
processing the second mask film using the first resist mask to form a second mask layer overlapping with the first pixel electrode;
removing the first resist mask by ashing using plasma;
processing the first mask film using the second mask layer as a hard mask to form a first mask layer overlapping with the first pixel electrode;
processing the first film by a dry etching method using the first mask layer and the second mask layer as a hard mask to form a first layer overlapping with the first pixel electrode and expose the second pixel electrode;
forming a second film over the second mask layer and the second pixel electrode;
forming, over the second film, a third mask film that is an insulating film;
forming, over the third mask film, a fourth mask film that is a metal film or an alloy film;
forming, over the fourth mask film, a second resist mask overlapping with the second pixel electrode;
processing the fourth mask film using the second resist mask to form a fourth mask layer overlapping with the second pixel electrode;
removing the second resist mask by ashing using plasma;
processing the third mask film using the fourth mask layer as a hard mask to form a third mask layer overlapping with the second pixel electrode;
processing the second film by a dry etching method using the third mask layer and the fourth mask layer as a hard mask to form a second layer overlapping with the second pixel electrode and expose the second mask layer;
removing the second mask layer and the fourth mask layer by a wet etching method;
removing at least part of each of the first mask layer and the third mask layer by a wet etching method to expose a top surface of the first layer and a top surface of the second layer;
and
forming a common electrode to cover the first layer and the second layer,
wherein the first layer comprises a first light-emitting layer, and
wherein the second layer comprises a second light-emitting layer.

20 more elements

A method for manufacturing a display device, comprising:

forming a first pixel electrode and a second pixel electrode;
forming a first light-emitting film over the first pixel electrode and the second pixel electrode;
forming a first functional film over the first light-emitting film;
forming a first mask film over the first functional film;
processing the first light-emitting film, the first functional film, and the first mask film to form a first light-emitting layer, a first functional layer, and a first mask layer over the first pixel electrode and expose the second pixel electrode;
forming a second light-emitting film over the first mask layer and the second pixel electrode;
forming a second functional film over the second light-emitting film;
forming a second mask film over the second functional film;
processing the second light-emitting film, the second functional film, and the second mask film to form a second light-emitting layer, a second functional layer, and a second mask layer over the second pixel electrode and expose the first mask layer;
forming a first insulating film over the first mask layer and the second mask layer;
forming a second insulating film over the first insulating film;
processing the second insulating film to form a second insulating layer overlapping with a region interposed between the first pixel electrode and the second pixel electrode;
performing etching treatment using the second insulating layer as a mask to remove part of the first insulating film so that a first insulating layer overlapping with the second insulating layer is formed and remove part of the first mask layer and part of the second mask layer so that a top surface of the first functional layer and a top surface of the second functional layer are exposed;
forming a first common layer to cover the first functional layer, the second functional layer, and the second insulating layer;
and
forming a common electrode over the first common layer,
wherein the first functional layer, the second functional layer, and the first common layer are formed using the same material.

14 more elements

Dependencies are inferred from the claim text.