Bulk acoustic resonator and manufacturing method thereof, filter and electronic device
AssigneeJwl (Zhejiang) Semiconductor Co., Ltd.
InventorsLinping LI, Meihui CUI
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AssigneeJwl (Zhejiang) Semiconductor Co., Ltd.
InventorsLinping LI, Meihui CUI
Estimating the term…
A bulk acoustic resonator, a method for manufacturing a bulk acoustic resonator, a filter, and an electronic device are provided. The bulk acoustic resonator includes a substrate, an acoustic reflection structure, a bottom electrode, a piezoelectric layer and a top electrode. The acoustic reflection structure, the bottom electrode, the piezoelectric layer and the top electrode are arranged sequentially in a direction away from the substrate. A first depression is defined on a surface of the bottom electrode away from the substrate. In forming the piezoelectric layer on a side of the bottom electrode away from the substrate, morphology of the first depression is transferred to a surface of the piezoelectric layer away from the substrate to form a second depression on a surface of the piezoelectric layer away from the substrate. The piezoelectric layer has an equal thickness.
A bulk acoustic resonator, comprising:
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A method for manufacturing a bulk acoustic resonator, comprising:
Dependencies are inferred from the claim text.