Semiconductor devices including conductive structure and shielding layer and methods of manufacturing semiconductor devices
AssigneeAmkor Technology Japan, Inc.
InventorsTakahiro YADA, Tsukasa TAKAIWA
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Abstract
In one example, a semiconductor structure or device comprises a substrate comprising a conductive structure having a top side and a first shielding terminal on the top side of the conductive structure, an electronic component on the top side of the conductive structure, a package body on the top side of the conductive structure and contacting a side of the electronic component, a shield on a top side of the package body and a lateral side of the package body, and a shield interconnect coupling the shield to the first shielding terminal of the conductive structure. Other examples and related methods are also disclosed herein.
Claims21
(canceled)
A semiconductor structure, comprising:
- a substrate comprising a dielectric structure and a conductive structure, wherein the conductive structure comprises an interconnect terminal, and the interconnect terminal comprises a concave recess exposed from the dielectric structure at a lateral side of the substrate and a bottom side of the substrate;
- a first plating on a top side of the interconnect terminal;
- a first electronic component over a top side of the conductive structure;
- a package body over the top side of the conductive structure and covering a lateral side of the first electronic component;
- and
- a component interconnect in the package body coupled with the first electronic component and coupled to the interconnect terminal via the first plating.
A method to manufacture a semiconductor structure, comprising:
- providing a substrate comprising a dielectric structure and a conductive structure, wherein the conductive structure comprises an interconnect terminal, and the interconnect terminal comprises a concave structure exposed from the dielectric structure at a lateral side of the substrate and a bottom side of the substrate;
- providing a first plating on a top side of the interconnect terminal;
- providing a first electronic component over a top side of the conductive structure;
- providing a component interconnect coupled with the first electronic component and coupled to the interconnect terminal via the first plating;
- and
- providing a package body over the top side of the conductive structure and covering the component interconnect and a lateral side of the first electronic component.
A semiconductor structure, comprising:
- a substrate comprising a dielectric structure and a conductive structure;
- a first electronic component over a top side of the conductive structure and coupled to the conductive structure;
- a second electronic component over the top side of the conductive structure and coupled to the conductive structure;
- a package body over the top side of the conductive structure and covering a lateral side of the first electronic component and a lateral side of the second electronic component;
- a vertical shield structure in the package body between the first electronic component and the second electronic component;
- and
- a shield over the package body and covering a lateral side of the package body.
Dependencies are inferred from the claim text.