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US 2024/0263831 A1Published application
Cooling system, a semiconductor apparatus including the same, and a method of replacing a filter using the same
AssigneeSamsung Electronics Co., Ltd.
InventorMOONKI KIM
Life of this patent
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Abstract
A cooling system includes an air supply unit, and a filter unit providing an air intake path and an air exhaust path. The filter unit includes a first filter part including a first filter and providing a first panel slot, a second filter part including a second filter and providing a second panel slot, and a blocking panel. The blocking panel is located in one of the first and second panel slots.
Claims20
A cooling system comprising:
- an air supply unit;
- and
- a filter unit providing an air intake path and an air exhaust path,
- wherein the filter unit comprises:
- a first filter part including a first filter and providing a first panel slot;
- a second filter part including a second filter and providing a second panel slot;
- and
- a blocking panel, and
- wherein the blocking panel is located in one of the first and second panel slots and is configured to block a path of air through one of the first filter part and the second filter part.
6 more elements
A semiconductor apparatus comprising:
- a substrate processing apparatus;
- and
- a cooling system connected to the substrate processing apparatus,
- wherein the cooling system comprises:
- an air supply unit;
- and
- a filter unit,
- wherein the filter unit comprises:
- first to third filter parts stacked in a vertical direction;
- and
- a blocking panel located in one of the first to third filter parts, and
- wherein the blocking panel is configured to block a path of air through the one of the first to third filter parts.
9 more elements
A method of replacing a filter, the method comprising:
- removing a blocking panel from a first filter part:
- locating the blocking panel in a second filter part;
- and
- replacing the filter of the second filter part,
- wherein the replacing of the filter comprises:
- passing air through the first filter part.
3 more elements
Dependencies are inferred from the claim text.