Part replacement system and part replacement device
AssigneeTokyo Electron Limited
InventorsAtsushi SAWACHI, Ichiro SONE, Suguru SATO, Takuya NISHIJIMA
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AssigneeTokyo Electron Limited
InventorsAtsushi SAWACHI, Ichiro SONE, Suguru SATO, Takuya NISHIJIMA
Estimating the term…
A part replacement system includes a part storage device configured to store an unused consumable part, and a replacement device that is connected to a processing device and the part storage device, the replacement device being configured to replace a used consumable part installed in the processing device with the unused consumable part stored in the part storage device. The replacement device is moved to a position of the processing device having the used consumable part that requires replacement, and the replacement device is connected to the processing device, and the part storage device is moved to a position of the replacement device connected to the processing device having the used consumable part that requires replacement, and the part storage device is connected to the replacement device.
A part replacement system, the system comprising:
Dependencies are inferred from the claim text.