Vibrator device
AssigneeSeiko Epson Corporation
InventorsRyuta Nishizawa, Junichi Takeuchi
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Abstract
A vibrator device includes: a base including a semiconductor substrate having an integrated circuit disposed at a second surface; a vibration element electrically coupled to the integrated circuit; and a lid having an end surface of a side wall bonded to a first surface at a bonding portion. A first circuit of the integrated circuit includes a first circuit element disposed in a first region overlapping the bonding portion in a plan view. The first circuit element is a passive element or a transistor, and θ>90° is satisfied, θ being an angle formed by the first surface and an inner side surface of the side wall.
Claims20
A vibrator device comprising:
- a base including a semiconductor substrate that has a first surface and a second surface in a front and back relationship with the first surface and that has an integrated circuit disposed at the second surface;
- a vibration element electrically coupled to the integrated circuit;
- and
- a lid provided with a recess for accommodating the vibration element, including a side wall around the recess, and having an end surface of the side wall bonded to the first surface at a bonding portion, wherein
- the integrated circuit includes a first circuit,
- the first circuit includes a first circuit element disposed in a first region of the second surface, the first region overlapping the bonding portion in a plan view orthogonal to the second surface,
- the first circuit element is a passive element or a transistor, and
- θ>90°, θ being an angle formed by the first surface and an inner side surface of the side wall.
Dependencies are inferred from the claim text.