Vibrator device
AssigneeSeiko Epson Corporation
InventorsRyuta Nishizawa, Junichi Takeuchi
Life of this patent
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Abstract
A vibrator device includes: a base having an integrated circuit disposed at a second surface; a vibration element; and a lid having an end surface of a side wall bonded to a first surface of the base at a bonding portion. The integrated circuit includes a first circuit and a second circuit, the first circuit includes a plurality of first circuit elements disposed in a first region ARA, and the second circuit includes a second circuit element disposed in a second region ARB. At this time, the following relations are established. { 1 - L 1 A / WX } ≤ 0.95 { 1 - L 2 A / WX } ≤ 0.95 { 1 - L 3 A / WY } ≤ 0.95 { 1 - L 4 A / WY } ≤ 0.95 { 1 - L 1 B / WX } ≤ 0.8 { 1 - L 2 B / WX } ≤ 0.8 { 1 - L 3 B / WY } ≤ 0.8 { 1 - L 4 B / WY } ≤ 0.8
Claims13
A vibrator device comprising:
- a base including a semiconductor substrate that has a first surface and a second surface in a front and back relationship with the first surface and that has an integrated circuit disposed at the second surface;
- a vibration element electrically coupled to the integrated circuit;
- and
- a lid provided with a recess for accommodating the vibration element, including a side wall around the recess, and having an end surface of the side wall bonded to the first surface at a bonding portion, wherein
- the integrated circuit includes a first circuit and a second circuit,
- the second surface includes a first region and a second region,
- the first region surrounds the second region in a plan view orthogonal to the second surface,
- the first circuit includes a plurality of first circuit elements disposed in the first region,
- the second circuit includes a second circuit element disposed in the second region,
- the base has a first side, a second side that is an opposite side of the first side, a third side, and a fourth side that is an opposite side of the third side in the plan view orthogonal to the first surface,
- {1−L1A/WX}≤0.95, {1−L2A/WX}≤0.95, {1−L3A/WY}≤0.95, {1−L4A/WY}≤0.95, {1−L1B/WX}≤0.8, {1−L2B/WX}≤0.8, {1−L3B/WY}≤0.8, and {1−L4B/WY}≤0.8, a direction from the first side toward the second side being defined as a first direction, a direction from the third side toward the fourth side being defined as a second direction, WX being a distance in the first direction from a center point of the base to the first side and the second side, WY being a distance in the second direction from the center point of the base to the third side and the fourth side, L1A being a distance in the first direction between the first side and a corresponding side of the first region, L2A being a distance in the first direction between the second side and a corresponding side of the first region, L3A being a distance in the second direction between the third side and a corresponding side of the first region, L4A being a distance in the second direction between the fourth side and a corresponding side of the first region, LIB being a distance in the first direction between the first side and a corresponding side of the second region, L2B being a distance in the first direction between the second side and a corresponding side of the second region, L3B being a distance in the second direction between the third side and a corresponding side of the second region, and L4B being a distance in the second direction between the fourth side and a corresponding side of the second region,
- the plurality of first circuit elements are a plurality of passive elements or a plurality of active elements,
- the first circuit is a circuit whose circuit characteristic is set using a ratio of a circuit constant of the plurality of passive elements or the plurality of active elements,
- the second circuit is an oscillation circuit configured to oscillate the vibration element, and
- the second circuit element is at least one of a capacitive element and a resistive element provided in the oscillation circuit.
A vibrator device comprising:
- a base including a semiconductor substrate that has a first surface and a second surface in a front and back relationship with the first surface and that has an integrated circuit disposed at the second surface;
- a vibration element electrically coupled to the integrated circuit;
- and
- a lid provided with a recess for accommodating the vibration element, including a side wall around the recess, and having an end surface of the side wall bonded to the first surface at a bonding portion, wherein
- the integrated circuit includes a first circuit and a second circuit,
- the second surface includes a first region and a second region,
- the first region surrounds the second region in a plan view orthogonal to the second surface,
- the first circuit includes a plurality of first circuit elements disposed in the first region,
- the second circuit includes a second circuit element disposed in the second region,
- the base has a first side, a second side that is an opposite side of the first side, a third side, and a fourth side that is an opposite side of the third side in the plan view orthogonal to the first surface,
- {1−L1A/WX}≤0.95, {1−L2A/WX}≤0.95, {1−L3A/WY}≤0.95, {1−L4A/WY}≤0.95, {1−L1B/WX}≤0.8, {1−L2B/WX}≤0.8, {1−L3B/WY}0.8, and {1−L4B/WY}≤0.8, a direction from the first side toward the second side being defined as a first direction, a direction from the third side toward the fourth side being defined as a second direction, WX being a distance in the first direction from a center point of the base to the first side and the second side, WY being a distance in the second direction from the center point of the base to the third side and the fourth side, L1A being a distance in the first direction between the first side and a corresponding side of the first region, L2A being a distance in the first direction between the second side and a corresponding side of the first region, L3A being a distance in the second direction between the third side and a corresponding side of the first region, L4A being a distance in the second direction between the fourth side and a corresponding side of the first region, L1B being a distance in the first direction between the first side and a corresponding side of the second region, L2B being a distance in the first direction between the second side and a corresponding side of the second region, L3B being a distance in the second direction between the third side and a corresponding side of the second region, and L4B being a distance in the second direction between the fourth side and a corresponding side of the second region,
- the plurality of first circuit elements are a plurality of passive elements or a plurality of active elements,
- the first circuit is a circuit whose circuit characteristic is set using a ratio of a circuit constant of the plurality of passive elements or the plurality of active elements,
- the second circuit is a temperature compensation circuit configured to perform temperature compensation for an oscillation frequency of the vibration element, and
- the second circuit element is a resistive element provided in the temperature compensation circuit.
Dependencies are inferred from the claim text.