System for actively controlling a cavity length of an optical assembly
AssigneeCymer, Inc.
InventorsSaptaparna Das, Eric Anders Mason
Life of this patent
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AssigneeCymer, Inc.
InventorsSaptaparna Das, Eric Anders Mason
Estimating the term…
A system includes: an optical pulse stretcher including: a first reflective optical element: a second reflective optical element; and an optical coupling system, where a distance between the first reflective optical element and the second reflective optical element defines a separation distance in an optical cavity, and the optical coupling system is configured to bring pulses of light into the cavity and to allow pulses of light to exit the cavity. The system also includes an actuation system configured to control the separation distance; a sensor configured to produce data related to at least two pulses of light that exit the cavity; and a control system coupled to the actuation system, where the control system is configured to control the actuation system and the separation distance based on the data.
A system comprising:
A system comprising:
A control system configured for use with an optical pulse stretcher, the control system comprising:
An optical system comprising:
Dependencies are inferred from the claim text.