Semiconductor device and semiconductor memory device
AssigneeKioxia Corporation
InventorsYusuke NAKAJIMA, Akira TAKASHIMA, Tsunehiro INO, Yasushi NAKASAKI
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AssigneeKioxia Corporation
InventorsYusuke NAKAJIMA, Akira TAKASHIMA, Tsunehiro INO, Yasushi NAKASAKI
Estimating the term…
A semiconductor device of embodiments includes: a semiconductor layer; a gate electrode layer including a first conductive layer containing a first material and a second conductive layer between the first conductive layer and the semiconductor layer and containing a second material different from the first material; and a first insulating layer between the semiconductor layer and the gate electrode layer and containing aluminum oxide, the aluminum oxide including α (alpha)-aluminum oxide or θ (theta)-aluminum oxide. The direction of the crystal axis of the aluminum oxide falls within a range of ±10° with respect to a first direction from the semiconductor layer toward the gate electrode layer. The direction of the crystal axis of the first material falls within a range of ±10° with respect to the first direction. The direction of the crystal axis of the second material falls within a range of ±10° with respect to the first direction.
A semiconductor device, comprising:
A semiconductor memory device, comprising:
Dependencies are inferred from the claim text.