Semiconductor device, method of manufacturing semiconductor device, and electronic equipment

Abstract

A semiconductor device, a method of manufacturing the semiconductor device, and electronic equipment that make it possible to easily transfer a charge at a deep position in a substrate. A semiconductor device includes a photo-electric converting section, and a transfer transistor that transfers the charge of the photo-electric converting section to a charge accumulation section. The transfer transistor has a vertical gate electrode including an embedded electrode part embedded in a semiconductor substrate. The embedded electrode part includes an embedded upper electrode and an embedded lower electrode on a substrate deep-portion side relative to the embedded upper electrode and that has an electrode area size, in a plan view, greater than an electrode area size of the embedded upper electrode. The present disclosure can be applied to, for example, a solid-state imaging element including, in each pixel, a transfer transistor that transfers a charge accumulated in a photodiode section.

Dependencies are inferred from the claim text.