Image sensor
AssigneeSamsung Electronics Co., Ltd.
InventorsDongchan KIM, Byoungho KWON, Beomsuk LEE
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Abstract
An image sensor including a substrate including an active pixel region and a peripheral region surrounding the active pixel region; a metal layer on a peripheral region of the substrate; a lower reflective layer on the substrate and the metal layer; a resonance layer on the lower reflective layer; and an upper reflective layer on the resonance layer, wherein the resonance layer has a first thickness on the active pixel region in a vertical direction perpendicular to an upper surface of the substrate and a second thickness in the vertical direction on the peripheral region, and the first thickness is greater than the second thickness.
Claims20
An image sensor, comprising:
- a substrate including an active pixel region and a peripheral region surrounding the active pixel region;
- a metal layer on the peripheral region of the substrate;
- a lower reflective layer on the substrate and the metal layer;
- a resonance layer on the lower reflective layer;
- and
- an upper reflective layer on the resonance layer,
- wherein:
- the resonance layer has a first thickness on the active pixel region in a vertical direction perpendicular to an upper surface of the substrate and a second thickness in the vertical direction on the peripheral region, and
- the first thickness is greater than the second thickness.
An image sensor, comprising:
- a substrate including an active pixel region and a peripheral region surrounding the active pixel region, the active pixel region including an active region and a dummy region;
- a wiring structure on a lower surface of the substrate;
- a metal layer on the peripheral region of the substrate;
- a lower reflective layer on the substrate and the metal layer;
- a resonance layer on the lower reflective layer;
- and
- an upper reflective layer on the resonance layer,
- wherein the resonance layer includes:
- a first material layer covering the lower reflective layer on the active pixel region and on the peripheral region,
- first patterns extending through the first material layer on the active pixel region in a vertical direction perpendicular to an upper surface of the substrate, and
- a first residual layer on the first material layer and the first patterns on the dummy region.
An image sensor, comprising:
- a substrate including an active pixel region and a peripheral region surrounding the active pixel region;
- a metal layer on the peripheral region of the substrate;
- a lower reflective layer on the substrate and the metal layer;
- a resonance layer including a first resonance layer and a second resonance layer that are sequentially on the lower reflective layer;
- an upper reflective layer on the resonance layer;
- a plurality of color filters including a first color filter on the upper reflective layer on the active pixel region and a second color filter on the upper reflective layer on the peripheral region;
- and
- a micro-lens on the first color filter,
- wherein:
- the first resonance layer has a first thickness in a vertical direction perpendicular to an upper surface of the substrate on the active pixel region and a second thickness in the vertical direction on the peripheral region,
- the first thickness is greater than the second thickness, and
- a thickness in the vertical direction of the second resonance layer on the active pixel region is the same as a thickness in the vertical direction of the second resonance layer on the peripheral region.
Dependencies are inferred from the claim text.