Array substrates and manufacturing methods thereof, and display panels
AssigneeGuangzhou China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
InventorWei WU
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Abstract
An array substrate, a manufacturing method thereof, and a display panel are provided. The array substrate includes a substrate, a gate layer, a gate insulating layer, a semiconductor layer, a source and drain layer, and a protective layer stacked in sequence. The source and drain layer includes a metal laminated layer and an antioxidant protective layer. The metal laminated layer is disposed on the semiconductor layer. The antioxidant protective layer is disposed between the metal laminated layer and the protective layer.
Claims20
An array substrate, comprising:
- a substrate, a gate layer, a gate insulating layer, a semiconductor layer, a source and drain layer, and a protective layer stacked in sequence;
- wherein the source and drain layer comprises:
- a metal laminated layer disposed on the semiconductor layer;
- and
- an antioxidant protective layer disposed between the metal laminated layer and the protective layer.
A manufacturing method of an array substrate, comprising following steps:
- forming a gate layer, a gate insulating layer, and a semiconductor layer on a substrate in sequence;
- forming a metal laminated layer on the semiconductor layer;
- performing a plasma treatment on a surface of the metal laminated layer to form an antioxidant protective layer on the surface of the laminated metal layer;
- patterning the antioxidant protective layer and the laminated metal layer to form a source and drain layer;
- and
- forming a protective layer on the source and drain layer.
A manufacturing method of an array substrate, comprising following steps:
- forming a gate layer, a gate insulating layer, and a semiconductor layer on a substrate in sequence;
- forming a metal laminated layer on the semiconductor layer;
- patterning the metal laminated layer to form a patterned metal laminated layer;
- performing a plasma treatment on a surface of the patterned metal laminated layer to form an antioxidant protective layer on the surface of the patterned metal laminated layer, wherein the patterned metal laminated layer and the antioxidant protective layer form a source and drain layer;
- and
- forming a protective layer on the source and drain layer.
Dependencies are inferred from the claim text.