Optical path structure, optical path system, and transfer method

An optical path system comprising an optical path structure, wherein the optical path structure comprises:

• a beam adjustment module, configured to adjust a diameter of a laser beam and output a first beam;
• a beam shaping module, configured to perform energy homogenization on the first beam to obtain a second beam;
• and
• a beam focusing module, configured to focus the second beam and output a target light spot;
• wherein the target light spot is used for irradiating a device substrate, allowing a target device to be separated from a carrier substrate because a bonding material, after being irradiated by the target light spot, in the device substrate changes;
• wherein the bonding material is disposed between the target device and the carrier substrate.

A transfer method, wherein the transfer method adopts an optical path system comprising:

• a beam adjustment module, configured to adjust a diameter of a laser beam and output a first beam:
• a beam shaping module, configured to perform energy homogenization on the first beam to obtain a second beam;
• and a beam focusing module, configured to focus the second beam and output a target light spot:
• wherein the target light spot is used for irradiating a device substrate, allowing a target device to be separated from a carrier substrate because a bonding material, after being irradiated by the target light spot, in the device substrate changes:
• wherein the bonding material is disposed between the target device and the carrier substrate,
• wherein the transfer method comprises:
• providing the device substrate, wherein the device substrate comprises the target device, a carrier substrate, and the bonding material disposed between the target device and the carrier substrate;
• and
• controlling the optical path system to output the target light spot to irradiate the device substrate, allowing the target device to be separated from the carrier substrate because the bonding material, after being irradiated by the target light spot, in the device substrate changes.