Bonding pad, integrated circuit element, and integrated circuit device
AssigneeMitsubishi Electric Corporation
InventorsYuki TERADO, Kazuya HOKAZONO, Hongbo ZHANG, Shiori UOTA
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AssigneeMitsubishi Electric Corporation
InventorsYuki TERADO, Kazuya HOKAZONO, Hongbo ZHANG, Shiori UOTA
Estimating the term…
The bonding pad includes a surface electrode layer that has a first surface; a resistance layer that has a second surface; a stress buffer layer that is disposed between the surface electrode layer and the resistance layer in the first direction; and a connecting member that connects the surface electrode layer and the stress buffer layer in the first direction. The connecting member includes an insulator that is in contact with the each of the surface electrode layer and the stress buffer layer in the first direction, and a plurality of plugs that are in contact with the insulator in the direction orthogonal to the first direction and electrically connect the surface electrode layer and the stress buffer layer. In the first direction, a thickness of the stress buffer layer is larger than a thickness of the surface electrode layer.
A bonding pad of an integrated circuit element included in an integrated circuit device, the bonding pad comprising:
Dependencies are inferred from the claim text.