Semiconductor device and vibrator device
AssigneeSeiko Epson Corporation
InventorYusuke Matsuzawa
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AssigneeSeiko Epson Corporation
InventorYusuke Matsuzawa
Estimating the term…
A semiconductor device includes a semiconductor substrate including a first surface and a second surface and having a first through hole, a first insulating layer placed on the first surface, including a fourth surface, and having a second through hole, a second insulating layer placed on the second surface and having a first opening portion, a first conducting layer exposed from the second insulating layer by the first opening portion, an organic insulating layer placed on the fourth surface, a side surface of the second through hole, a side surface of the first through hole, a side surface of the first opening portion, and a surface of the first conducting layer, and a second conducting layer placed on a surface of the organic insulating layer and a surface of the first conducting layer, wherein the side surface of the second through hole is a first tapered surface.
A semiconductor device comprising:
Dependencies are inferred from the claim text.