US 2024/0258136 A1 · SUBSTRATE PROCESSING MODULE AND METHOD OF MOVING A WORKPIECE

Abstract

Embodiments disclosed herein include a substrate processing module and a method of moving a workpiece. The substrate processing module includes a shutter stack and two process stations. The shutter stack is disposed between the process stations. The method of moving a workpiece includes moving a supporting portion from a first location to a shutter stack in a first direction, retrieving the workpiece from the shutter stack, and moving the supporting portion to a second location. The transfer chamber assembly and method allows for moving workpieces to and from the shutter stack to the two process stations. A central transfer robot of the substrate processing module is configured to grip both substrates and shutter discs, allowing for one robot when typically two robots would be required.

Claims20

Dependent claims

A substrate processing module, comprising:

a plurality of walls that partially define a transfer region, the plurality of walls comprising:
a first wall;
and
a second wall disposed opposite the first wall;
a process station coupled to the first wall and connected to the transfer region, the process station comprising:
a processing region;
and
a process station opening disposed in the first wall and between the processing region and a pedestal assembly;
a robot disposed in the transfer region, the robot comprising:
a supporting portion comprising a surface configured to secure a workpiece thereon;
a shutter stack disposed in the transfer region, the shutter stack configured to support one or more of a shutter disc and a substrate, the shutter stack comprising:
a stack base comprising a shutter disc support;
a substrate support coupled to the stack base, the substrate support comprising a top portion;
and
a stack actuator coupled to the stack base, the stack actuator configured to move the stack base between the first wall and the second wall.

12 more elements

Dependencies are inferred from the claim text.

Substrate processing module and method of moving a workpiece

Life of this patent

Substrate processing module and method of moving a workpiece

Life of this patent

Abstract

Claims20