Method of manufacturing silicon optical member, silicon optical member, and light-emitting device

A silicon optical member comprising:

• a silicon member including
• a lower surface,
• a first lateral surface meeting the lower surface and extending upward from the lower surface,
• a primary surface meeting the first lateral surface and extending obliquely upward from the first lateral surface at an angle of 45 degrees relative to the lower surface,
• a second lateral surface meeting the primary surface at a position opposite to the first lateral surface and extending downward from the primary surface, and
• a third lateral surface meeting the second lateral surface and extending downward from the second lateral surface at an angle of 90 degrees relative to the lower surface, wherein
• a width between a side of the first lateral surface meeting the lower surface and a side of the first lateral surface meeting the primary surface is in a range of 30 μm to 100 μm, and
• a width between a lower end of the primary surface and an upper end of the primary surface is greater than a width between an end point of the lower surface at a first lateral surface side and an end point of the lower surface at a third lateral surface side.