Methods and techniques for determining when a probe tip is proximate to or in contact with a sample surface
AssigneeXallent, LLC
InventorsKwame Amponsah, Pardeep Kumar
Life of this patent
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Abstract
Micro and nanoscale probes are used in the semiconductor and thin film materials industries to test wafers and samples. Probes supply and measure signals to and from the sample. Signals could be electrical, mechanical, chemical, optical, or photonics. Techniques of capacitance response signal, intensity response signal, photocurrent response signal, piezoresistance response signal, a high frequency response signal, elongated image response signal, contrast response signal, electrical response signal, resonance response signal, current response signal, and/or current-in-plane response signal could be used to determine when the probe tips are in proximity or contact a sample surface.
Claims20
A method for determining when at least a probe with at least a probe tip is in proximity to or in contact with a sample surface of a sample, comprising the steps of:
- mounting a probe chip with a probe and/or sample on at least a moveable stage;
- and
- instructing the moveable stage to bring at least a probe tip into proximity or contact with the sample surface while measuring a response signal caused by the probe tip being in proximity or contact with the sample surface.
Dependencies are inferred from the claim text.