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US 2024/0255545 A1Published application
Probe card and test apparatus including probe card
AssigneeLx Semicon Co., Ltd.
InventorsMin Suk KIM, Seung Il HONG
Life of this patent
Estimating the term…
Abstract
A semiconductor chip disposed on a wafer may be tested by using a probe card provided at an upper portion of a chamber for testing the semiconductor chip. A signal generated from a test module is transmitted to a needle included in the probe card, so that abnormality in the semiconductor chip may be tested.
Claims20
A probe card comprising:
- a needle;
- a printed circuit board (PCB) electrically connected to one side of the needle;
- and
- a fixing member configured to fix the other side of the needle,
- wherein the fixing member fixes a part of the other side of the needle such that an end of the other side of the needle passes through to be exposed to the outside, and
- a whole or part of a side surface of the fixing member through which the end of the other side of the needle passes is a curved surface.
3 more elements
A probe card comprising:
- a needle;
- a printed circuit board (PCB) electrically connected to one side of the needle;
- and
- a fixing member configured to fix the other side of the needle,
- wherein the fixing member fixes a part of the other side of the needle such that an end of the other side of the needle passes through to be exposed to the outside, and
- a whole or part of a side surface of the fixing member through which the end of the other side of the needle passes is an inclined surface.
3 more elements
A test apparatus comprising:
- a test module configured to generate a test signal to transmit the test signal to a printed circuit board (PCB) and process the received signal;
- and
- a chamber including a chuck on which an element to be tested is disposed and a probe card fixed to an upper portion of the chuck to test the element to be tested,
- wherein the probe card includes:
- a needle;
- a printed circuit board (PCB) electrically connected to one side of the needle;
- and
- a fixing member configured to fix the other side of the needle,
- wherein the fixing member fixes a part of the other side of the needle such that an end of the other side of the needle passes through to be exposed to the outside, and
- a whole or part of a side surface of the fixing member through which the end of the other side of the needle passes is a curved surface.
7 more elements
Dependencies are inferred from the claim text.