US 2024/0255449 A1 · NON-DESTRUCTIVE CLASSIFICATION OF SPECIMENS BASED ON ENERGY SIGNATURE MEASUREMENTS

Abstract

Disclosed herein is a system for non-destructive classification of specimens. The system includes an e-beam source, an X-ray measurement module, and a computational module. The e-beam source is configured to project e-beams on a specimen at one or more e-beam landing energies, so as to penetrate the specimen and induce emission of X-rays. The X-ray measurement module is configured to measure the emitted X-rays. The computational module is configured to process the measurement data to obtain an energy signature of at least one target substance included in the specimen and classify the inspected specimen based on the obtained energy signature and one or more reference energy signatures pertaining to one or more reference specimens, respectively.

Claims20

Dependent claims

A system for non-destructive classification of specimens, the system comprising:

an electron beam (e-beam) source configured to project e-beams on a specimen being inspected at one or more e-beam landing energies, the e-beams being configured to penetrate the inspected specimen and induce emission of X-rays;
an X-ray measurement module configured to obtain measurement data by measuring the emitted X-rays;
and
a computational module configured to:
process the measurement data to obtain an energy signature of at least one target substance which the inspected specimen comprises, the energy signature being indicative of a dependence on the e-beam landing energy of an intensity of the emitted X-rays about each of at least one characteristic X-ray line of the at least one target substance, respectively;
and
classify the inspected specimen based on the measured energy signature and one or more reference energy signatures pertaining to one or more reference specimens, respectively.

4 more elements

A computer-based method for non-destructive classification of specimens, the method comprising:

a measurement operation comprising, for each of at least one e-beam landing energy, suboperations of:
projecting an e-beam on an inspected specimen, the e-beam being configured to penetrate the inspected specimen to a degree dependent on the e-beam landing energy;
and
obtaining measurement data by measuring X-rays emitted from the inspected specimen due to the penetration of the e-beam;
and
a data analysis operation comprising suboperations of:
processing the measurement data to obtain an energy signature of at least one target substance which the inspected specimen comprises, the energy signature being indicative of a dependence on the e-beam landing energy of an intensity of the emitted X-rays about each of at least one characteristic X-ray line of the at least one target substance, respectively;
and
classifying the inspected specimen based on the measured energy signature and one or more reference energy signatures pertaining to one or more reference specimens, respectively.

6 more elements

Dependencies are inferred from the claim text.

Non-destructive classification of specimens based on energy signature measurements

Life of this patent

Non-destructive classification of specimens based on energy signature measurements

Life of this patent

Abstract

Claims20