Detecting defects in array regions on specimens

A non-transitory computer-readable medium, storing program instructions executable on a computer system for performing a computer-implemented method for detecting defects in an array region on a specimen, wherein the computer-implemented method comprises:

• acquiring output responsive to patterned features formed in an array region on a specimen generated by an inspection subsystem;
• determining if a pitch of the patterned features in the output is an integer of pixels in a detector of the inspection subsystem that generated the output;
• when the pitch is not an integer of the pixels, interpolating the output to generate interpolated output having a modified pitch of the patterned features in the interpolated output that is an integer of the pixels;
• and
• detecting defects in the array region by applying a defect detection method to the interpolated output.

A computer-implemented method for detecting defects in an array region on a specimen, comprising:

• acquiring output responsive to patterned features formed in an array region on a specimen generated by an inspection subsystem;
• determining if a pitch of the patterned features in the output is an integer of pixels in a detector of the inspection subsystem that generated the output;
• when the pitch is not an integer of the pixels, interpolating the output to generate interpolated output having a modified pitch of the patterned features in the interpolated output that is an integer of the pixels;
• and
• detecting defects in the array region by applying a defect detection method to the interpolated output, wherein said acquiring, determining, interpolating, and detecting are performed by a computer subsystem coupled to the inspection subsystem.