X-ray transmission inspection apparatus and x-ray transmission inspection method

An X-ray transmission inspection apparatus comprising:

• an X-ray source configured to irradiate a sample with X-rays:
• an X-ray sensor installed on a side opposite to the X-ray source with respect to the sample and configured to detect transmitted X-rays when X-rays pass through the sample:
• a moving mechanism configured to move the sample relative to the X-ray source and the X-ray sensor;
• and
• a calculation part configured to calculate a height position of a foreign object in a thickness direction in the sample based on the transmitted X-rays detected by the X-ray sensor,
• wherein the X-ray source performs irradiation with X-rays in a direction tiled with respect to the thickness direction of the sample and a transport direction of the sample, and
• the moving mechanism is capable of moving the sample in a first transport direction orthogonal to the thickness direction and in a second transport direction opposite to the first transport direction, and is capable of changing an X-ray irradiation angle for the sample when the moving mechanism moves the sample in the first transport direction and an X-ray irradiation angle for the sample when the moving mechanism moves the sample in the second transport direction by moving the X-ray source, the X-ray sensor, and the sample relative to one another.