Inspection apparatus

An inspection apparatus comprising:

• a light source disposed to be spaced apart from an inspection object in a first direction, wherein the light source radiates a beam;
• a first lens disposed between the inspection object and the light source, wherein the first lens is provided with a first opening defined therethrough in the first direction;
• a second lens disposed between the inspection object and the first lens, wherein the second lens is provided with a second opening defined therethrough in the first direction to overlap the first opening;
• and
• an inspection unit disposed to be spaced apart from the inspection object with the first lens interposed therebetween, wherein the inspection unit comprises an incidence portion disposed to overlap the first opening and the second opening on a plane,
• wherein at least one selected from the first lens and the second lens comprises:
• a plurality of first sub-lenses disposed along a periphery of the first opening or the second opening and each having a first radius of curvature;
• and
• a plurality of second sub-lenses disposed alternately with the first sub-lenses along the periphery of the first opening or the second opening and each having a second radius of curvature.