Smart Seals for Monitoring and Analysis of Seal Properties Useful in Semiconductor Valves

A system for analyzing seal life, comprising:

• at least one memory for storing computer-executable instructions;
• and
• at least one processing unit for executing the instructions stored in the memory, wherein execution of the instructions programs the at least one processing unit to perform operations comprising:
• engaging a valve assembly movable from an open position to a closed position, to place the valve assembly in operation, wherein the valve assembly comprises a seal having elastomeric properties and the seal is seated within the valve and in contact with a surface of the valve assembly, and wherein pressure is applied to the valve assembly in operation and the seal is subject to degradation;
• receiving from a circuit a signal from a change in voltage, wherein the circuit is in communication with at least one sensor for measuring micro strain and with at least one sensor for measuring at least one other property related to an ambient condition of operation or related to degradation of the seal on a surface of the valve assembly or within the valve assembly;
• recording micro strain data and data related to the at least one other property at a time after operation of the valve assembly is initiated;
• measuring micro strain and the at least one other property at 100% seal life to create baseline data and measuring micro strain and the at least one other property again at one or more percentages of seal life to create an adjusted range of baseline data;
• and
• analyzing the recorded data against the baseline data and/or the adjusted range of baseline data associated with 100% seal life to evaluate seal life at the time after the operation of the valve assembly is initiated as a percentage of seal life less than 100%.

A method for monitoring seal life comprising:

• providing a valve assembly movable from an open position to a closed position and comprising a seal having elastomeric properties seated within the valve and in contact with a surface of the valve assembly, wherein when the seal is in operation it is subject to degradation and wherein the valve is one of a valve assembly with a door, a pendulum valve assembly, and an isolation valve assembly;
• placing at least one sensor for measuring micro strain and at least one sensor for measuring at least one other property related to an ambient condition of operation or related to degradation of the seal on a surface of the valve assembly or within the valve assembly;
• placing the valve assembly in an operation wherein the seal is subject to degradation and initiating the operation of the valve assembly, wherein initiating the operation of the valve assembly comprises initiating a vacuum process when the valve assembly is in the closed position;
• at a time after the operation is initiated, recording micro strain data and data related to the at least one other property;
• creating baseline data by initially measuring micro strain and the at least one other property at 100% seal life and measuring micro strain and the at least one other property again at one or more percentages of seal life to create an adjusted range of baseline data;
• and
• analyzing the recorded data against baseline data and/or the adjusted range of baseline data associated with 100% seal life to evaluate seal life at the time after the operation is initiated as a percentage of seal life less than 100%.