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US 2024/0255371 A1Published application
Multilayer electrode, strain resistance film with electrode, and pressure sensor
AssigneeTDK Corporation
InventorsMasanori KOBAYASHI, Masamitsu HAEMORI, Ken UNNO, Tetsuya SASAHARA, Kohei NAWAOKA
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Abstract
There is provided a multilayer electrode including a contact layer capable of being superposed on a strain resistance film; a diffusion prevention layer superposed on the contact layer; and a mounting layer superposed on the diffusion prevention layer, in which the diffusion prevention layer contains a transition element belonging to the fifth or sixth periods.
Claims11
A multilayer electrode comprising:
- a contact layer capable of being superposed on a strain resistance film;
- a diffusion prevention layer superposed on the contact layer;
- and a mounting layer superposed on the diffusion prevention layer,
- wherein the diffusion prevention layer contains a transition element belonging to the fifth or sixth period.
1 more element
Dependencies are inferred from the claim text.