Complex sensing device and sensing method including the same

A complex sensing device comprising:

• a thickness sensing device comprising:
• a pulse generator configured to generate a probe pulse and a pump pulse;
• the pump pulse being transmitted toward a surface of a sample and being configured to generate an acoustic signal in the sample;
• a detector configured to receive a reflection probe pulse generated by the probe pulse being reflected from the sample;
• a first processor configured to receive and process a first signal from the detector;
• and
• a phase detector configured to receive a split reflection probe pulse split from the reflection probe pulse;
• and
• a surface shape sensing device configured to obtain a surface shape of the sample based on a split probe pulse split from the probe pulse and a signal output from the phase detector for measurement.

A complex sensing method comprising:

• emitting a probe pulse and a pump pulse from a pulse generating device;
• splitting the probe pulse toward a sample by a first optical splitter;
• irradiating the sample with the pump pulse and the probe pulse;
• transmitting a reflection probe pulse, which is the probe pulse reflected by the sample, to a detector;
• splitting the reflection probe pulse toward the detector by a second optical splitter;
• inputting a first pulse split from the probe pulse by the first optical splitter and a second pulse split from the reflection probe pulse by the second optical splitter to a surface shape sensing device;
• sensing a thickness of the sample based on a change in reflectance of the sample obtained by the detector;
• and
• sensing a surface shape of the sample through time of flight difference data between the first pulse and the second pulse in the surface shape sensing device.