Method of manufacturing angle sensors including magnetoresistance elements including different types of antiferromagnetic materials

A magnetic-field angle sensor comprising:

• a first bridge comprising magnetoresistance (MR) elements each comprising a first type of antiferromagnetic material having a first Néel temperature and a first magnetization direction;
• and
• a second bridge comprising MR elements comprising a second type of antiferromagnetic material having a second Néel temperature and a second magnetization direction,
• wherein the first magnetization direction is orthogonal to the second magnetization direction, and
• wherein the first Néel temperature is higher than the second Néel temperature.

A method, comprising:

• manufacturing a magnetic-field angle sensor comprising:
• heating, to a first temperature, a substrate comprising:
• heating a first magnetoresistance (MR) element comprising a first type of antiferromagnetic material having a first blocking temperature and a first magnetization direction;
• heating a second MR element comprising a second type of antiferromagnetic material having a second blocking temperature and a second magnetization direction, wherein the first blocking temperature is greater than the second blocking temperature, wherein the first temperature is greater than the first blocking temperature;
• after heating the substrate to the first temperature, applying a first magnetic field to the substrate in an x-direction to enable the first magnetization direction and the second magnetization direction to be in the x-direction;
• cooling the substrate to a temperature less than the first blocking temperature while applying the first magnetic field;
• enabling a temperature of the substrate to be a second temperature after ceasing to apply the first magnetic field, wherein the second temperature is less than the first blocking temperature and greater than the second blocking temperature;
• and
• applying a second magnetic field to the substrate in a y-direction to enable the second magnetization direction to be in the y-direction.