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US 2024/0254651 A1Published application
Quartz glass crucible, manufacturing method thereof, and manufacturing method of silicon single crystal
AssigneeSumco Corporation
InventorsMasami OHARA, Hiroshi KISHI, Eriko KITAHARA, Hideki FUJIWARA
Life of this patent
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Abstract
A quartz glass crucible includes a crucible base body including silica glass and a coating film containing a crystallization accelerator and formed on the inner surface of the crucible base body. The average carbon concentration in the coating film, and the crucible base body within a range of 0 μm or more and 300 μm or less in depth from the inner surface of the crucible base body is 1.0×1012 atoms/cc or more and 3.0×1019 atoms/cc or less.
Claims19
A quartz glass crucible comprising:
- a crucible base body consisting of silica glass;
- and
- a coating film containing a crystallization accelerator and formed on an inner surface of the crucible base body,
- wherein an average carbon concentration in the coating film and the crucible base body within a range of 0 μm or more and 300 μm or less in depth from the inner surface thereof is 1.0×1012 atoms/cc or more and 3.0×1019 atoms/cc or less.
1 more element
A manufacturing method of a quartz glass crucible, comprising:
- producing a crucible base body consisting of silica glass;
- and
- applying a coating liquid containing a crystallization accelerator on an inner surface of the crucible base body to form a coating film of the crystallization accelerator,
- wherein the producing the crucible base body includes arc melting of silica powder having a carbon content of less than 6 ppm and used as a raw material for the inner surface of the crucible base body, using a carbon electrode having bulk specific gravity of 1.50 g/cc or more and 1.75 g/cc or less and specific resistivity of 330 μΩ·cm or more and 600 μΩ·cm or less, and
- the crystallization accelerator is a compound of an element (Mg, Ca, Sr, or Ba) in the group 2a, which has no carbon atoms in a molecule.
2 more elements
Dependencies are inferred from the claim text.