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US 2024/0253997 A1Published application
Synthesis of 1,1,1-trichlorodisilane
AssigneeDDP Specialty Electronic Materials US 9, LLC
InventorsAndrew Millward, Brian D. Rekken, Travis Sunderland, Jeanette K. Young, Xiaobing Zhou
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Abstract
A method of making a trihalodisilane, the method comprising: combining a reductive effective amount of an alkylaluminum hydride, a halodisilane comprising at least 4 halogen atoms, and a solvent at a temperature <80° C. and reducing the halodisilane to form a reaction product mixture comprising a trihalodisilane and an alkylaluminum halide.
Claims15
A method of making a trihalodisilane, the method comprising:
- combining a reductive effective amount of an alkylaluminum hydride, a halodisilane comprising at least 4 halogen atoms, and a solvent at a temperature <150° C. and reducing the halodisilane to form a reaction product mixture comprising a trihalodisilane, an alkylaluminum halide, and the solvent.
(canceled)
A trihalodisilane composition, comprising:
- <2% (w/w) of an alkylsilane and >98% (w/w) of a trihalodisilane.
Dependencies are inferred from the claim text.