Substrate conveying robot and control method for substrate conveying robot
AssigneeKawasaki Jukogyo Kabushiki Kaisha
InventorsSatoshi HASHIZAKI, Shinya KITANO
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Abstract
A substrate conveying robot includes a controller configured or programmed to acquire a conveyance gap based on an image captured by an imager, and control at least one of carrying a substrate out of a storage or carrying the substrate into the storage based on a size of an acquired conveyance gap.
Claims12
A substrate conveying robot operable to perform at least one of carrying a substrate out of a storage storing a plurality of substrates or carrying the substrate into the storage, the substrate conveying robot comprising:
- a robot arm;
- a substrate holding hand attached to a tip end of the robot arm to hold the substrate;
- an imager to image the plurality of substrates stored in the storage;
- and
- a controller configured or programmed to:
- acquire, based on an image captured by the imager, a conveyance gap including at least one of a gap in the storage between a position of the substrate holding hand and the substrate, a gap in the storage between the substrate being conveyed by the substrate holding hand and a substrate adjacent to the substrate being conveyed by the substrate holding hand, or a gap between the substrates stored in the storage;
- and
- control operations of the robot arm and the substrate holding hand to perform at least one of carrying the substrate out of the storage or carrying the substrate into the storage based on a size of an acquired conveyance gap.
A control method for a substrate conveying robot operable to perform at least one of carrying a substrate out of a storage storing a plurality of substrates or carrying the substrate into the storage, the control method comprising:
- imaging the plurality of substrates stored in the storage using an imager;
- acquiring, based on an image captured by the imager, a conveyance gap including at least one of a gap in the storage between a position of a substrate holding hand of the substrate conveying robot and the substrate, a gap in the storage between the substrate being conveyed by the substrate holding hand and a substrate adjacent to the substrate being conveyed by the substrate holding hand, or a gap between the substrates stored in the storage;
- and
- controlling operations of a robot arm of the substrate conveying robot and the substrate holding hand to perform at least one of carrying the substrate out of the storage or carrying the substrate into the storage based on a size of an acquired conveyance gap.
Dependencies are inferred from the claim text.