Linear or rotary table movable in two dimensions

A method for moving a linear or rotary table movable in two dimensions, the linear or rotary table comprising a stator, at least one upper slider plate which can move relative to the stator in two independent translational directions or two independent rotary directions, a central slider plate arranged between the stator and the upper slider plate, and at least two piezoelectric linear drives attached to the stator and configured to move the upper slider plate in the two translational directions or two rotary directions, wherein at least one piezoelectric linear drive attached to the stator is in contact with the upper slider plate through an opening in the central slider plate and is configured to move the upper slider plate in a first translational direction or a first rotary direction, the method comprising:

• adding or subtracting individual motion contributions of all the piezoelectric linear drives attached to the stator to move the upper slider plate in one or both independent translational directions, or respectively in one or both independent rotary directions.