# US 2024/0249901 A1 · Overcurrent protection

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- Number: US 2024/0249901 A1
- Document ID: US20240249901A1
- Status: Published application
- Kind: A1
- Application number: 18/158,131
- Filed: 2023-01-23
- Published: 2024-07-25
- Earliest claimed: 2023-01-23
- Assignees: Atomica Corporation
- Applicants: Atomica Corp.
- Inventors: Soheil Seena Partokia; Brian Maertz
- Web page: https://patentgrep.com/patent/US20240249901A1

## CPC

- H01H 47/002: {Monitoring or fail-safe circuits}
- H01H 1/0036: {Switches making use of microelectromechanical systems [MEMS] (for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009)}
- H01H 50/005: {using micromechanics}
- H01H 59/0009: {making use of micromechanics}
- H02H 1/0007: {concerning the detecting means (in general G01R or other subclasses of G01; reed switches H01H71/2445)}
- H02H 3/08: responsive to excess current (responsive to abnormal temperature caused by excess current H02H5/04)
- H01F 2007/068: {using printed circuit coils}
- H01H 1/20: Bridging contacts {(for circuit breakers H01H73/045)}
- H01H 2001/0084: {with perpendicular movement of the movable contact relative to the substrate}
- H01H 2036/0093: {Micromechanical switches actuated by a change of the magnetic field}
- H01H 2050/007: {Relays of the polarised type, e.g. the MEMS relay beam having a preferential magnetisation direction}
- H01H 2071/008: {Protective switches or relays using micromechanics}
- H01H: ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES (contact cables H01B7/10; electrolytic self-interrupters H01G9/18; emergency protective circuit arrangements H02H; switching by electronic means without contact-making H03K17/00)
- H02H: EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS (indicating or signalling undesired working conditions G01R, e.g. G01R31/00, G08B; locating faults along lines G01R31/08; emergency protective devices H01H)
- H01F: MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES

## Abstract

A microelectromechanical systems (MEMS) switch device including current sensing and overcurrent protection can include a movable plate movable between an open position and a closed position, wherein the moveable plate is moved by applying at least one or more of an electrostatic force and a magnetic force to move the movable plate. The movable plate can include a shunt operable to conduct current when the movable plate is the closed position. An inductive coil electronically coupled to the shunt can detect current conducted through the shunt.

## Claims

### Claim 1

A microelectromechanical systems (MEMS) switch device, comprising:
a movable plate movable between an open position and a closed position, wherein the MEMS switch device is activated by at least one or more of an electrostatic force and a magnetic force moving the movable plate;
shunt operable to conduct current when the movable plate is the closed position; and
an inductive coil electrically coupled to the shunt.

### Claim 2 (depends on 1)

The MEMS switch device of claim 1, wherein the MEMS switch device is activated by the electrostatic force moving the movable plate to the closed position.

### Claim 3 (depends on 1)

The MEMS switch device of claim 1, wherein the MEMS switch device is activated by the magnetic force moving the movable plate to the closed position.

### Claim 4 (depends on 1)

The MEMS switch device of claim 1, wherein the current conducted by the shunt induces an electrical field flux in the inductive coil.

### Claim 5 (depends on 3)

The MEMS switch device of claim 3, wherein an electrical field flux in the inductive coil being greater than a calibrated threshold indicates an overcurrent condition in the shunt and de-activates the MEMS switch device by moving the movable plate to the open position.

### Claim 6 (depends on 1)

The MEMS switch device of claim 1, wherein one or more movable plates are coupled to a first substrate via one or more spring beams.

### Claim 7 (depends on 1)

The MEMS switch device of claim 1, wherein the inductive coil includes loops arranged in a plane.

### Claim 8 (depends on 1)

The MEMS switch device of claim 1, wherein the MEMS switch device and the inductive coil is included in a microelectronic package.

### Claim 9 (depends on 1)

The MEMS switch device of claim 1, wherein the inductive coil includes a small amount of current.

### Claim 10 (depends on 1)

The MEMS switch device of claim 1, wherein the inductive coil is arranged adjacent to the shunt.

### Claim 11

A method for current sensing in a microelectromechanical systems (MEMS) switch device, comprising:
moving one or more movable plates from an open position to a closed position, wherein the moveable plate is moved by applying at least one or more of an electrostatic force and a magnetic force to move the one or more movable plates;
conducting current through a shunt when the movable plate is the closed position; and
detecting the current conducted through the shunt with an inductive coil electrically coupled to the shunt.

### Claim 12 (depends on 11)

The method of claim 11, wherein the MEMS switch device is activated by the electrostatic force moving the one or more movable plates to the closed position.

### Claim 13 (depends on 11)

The method of claim 11, wherein the MEMS switch device is activated by the magnetic force moving the one or more movable plates to the closed position.

### Claim 14 (depends on 11)

The method of claim 11, wherein the current conducted by the shunt induces a voltage in the inductive coil.

### Claim 15 (depends on 13)

The method of claim 13, wherein an electrical field flux in the inductive coil is greater than a calibrated threshold indicates an overcurrent condition in the shunt and de-activates the MEMS switch device by moving the movable plate to the open position.

### Claim 16 (depends on 11)

The method of claim 11, wherein one or more movable plates are coupled to a first substrate via one or more spring beams.

### Claim 17 (depends on 11)

The method of claim 11, wherein the inductive coil includes loops arranged in a plane.

### Claim 18 (depends on 11)

The method of claim 11, wherein the MEMS switch device and the inductive coil is included in a microelectronic package.

### Claim 19 (depends on 11)

The method of claim 11, wherein the inductive coil includes a small amount of current.

### Claim 20 (depends on 11)

The method of claim 11, wherein the inductive coil is arranged adjacent to the shunt.
