Induction coil apparatus and radio frequency matching network incorporating the same
AssigneeASM IP Holding B.V.
InventorsRonald Anthony DECKER, Yogesh B. JAGDALE
Life of this patent
Estimating the term…
Abstract
A radio frequency (RF) matching system may include an airflow generator configured to generate an airflow stream and an induction coil apparatus positioned within the airflow stream to be generated by the airflow generator. The induction coil apparatus may include an induction coil and an airflow guide positioned and configured to direct the airflow stream to be generated by the airflow generator over the induction coil. The airflow generator may be downstream or upstream of the induction coil apparatus in the airflow stream to be generated by the airflow generator.
Claims20
A radio frequency (RF) matching system comprising:
- an airflow generator configured to generate an airflow stream;
- an induction coil apparatus positioned within the airflow stream to be generated by the airflow generator, the induction coil apparatus comprising:
- an induction coil;
- and
- an airflow guide positioned and configured to direct the airflow stream to be generated by the airflow generator over the induction coil.
An induction coil apparatus for use in a radio frequency matching network comprising:
- an induction coil;
- and
- an airflow guide configured to direct an incoming airflow stream over the induction coil;
- wherein:
- the induction coil defines a central coil cavity, the central coil cavity extending along a central axis from a first open end to a second open end, the central coil cavity having a central region located along the central axis and an outer region adjacent the induction coil and circumferentially surrounding the central region;
- and
- the airflow guide comprises an airflow diverter positioned within the central portion of the central coil cavity of the induction coil, the airflow diverter configured to divert an incoming airflow stream radially outward from the central axis and into the outer region.
An airflow diverter for cooling an induction coil in a radio frequency matching network comprising:
- a diverter body configured to be positioned in a central coil cavity defined by an induction coil;
- and
- a plurality of spacer ribs protruding from an outer surface of the diverter body, wherein the plurality of spacer ribs is configured to mount the airflow diverter to the induction coil and is configured to maintain an annular gap between the outer surface of the diverter body and an inner surface of the induction coil.
Dependencies are inferred from the claim text.