Polymer nanoparticle and method of preparing same
AssigneesSamsung Electronics Co., Ltd., Postech Research and Business Development Foundation
InventorsYoon Seok KO, Dong Pyo KIM, Sang Soo JEE, Se Jun YIM
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Abstract
Provided are a polymer nanoparticle, a method of preparing the polymer nanoparticle, and a polishing slurry including the polymer nanoparticle are provided, where the polymer nanoparticle including a mixture of a hydrophobic polymer and a copolymer including both hydrophobic and hydrophilic groups, the hydrophilic group of the copolymer is disposed on an outer surface of the polymer nanoparticle.
Claims20
A polymer nanoparticle, comprising:
- a mixture of a hydrophobic polymer and a copolymer comprising both hydrophobic and hydrophilic groups,
- wherein the hydrophilic group of the copolymer is disposed on an outer surface of the polymer nanoparticle.
A method of preparing a polymer nanoparticle that comprises a mixture of a hydrophobic polymer and a copolymer comprising both hydrophobic and hydrophilic groups such that the hydrophilic group of the copolymer is disposed on an outer surface of the polymer nanoparticle, the method comprising:
- precipitating the mixture of the hydrophobic polymer and the copolymer comprising both the hydrophobic and hydrophilic groups using a high-speed reprecipitation method.
Dependencies are inferred from the claim text.