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US 2024/0243034 A1Published application
High thermal conductivity boron arsenide for thermal management, electronics, optoelectronics, and photonics applications
AssigneeThe Regents of the University of California
InventorsYongjie HU, Joon Sang KANG
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Abstract
A device includes: (1) a boron arsenide substrate; and (2) an integrated circuit disposed in or over the boron arsenide substrate.
Claims17
A device comprising:
- a boron arsenide substrate or
- a component for electronics, photonics, or optoelectronics applications,
- wherein a boron arsenide material comprises part of an active device for the component or
- wherein the boron arsenide material is used as a semiconductor to increase the performance, speed or integration of the component, or
- wherein the boron arsenide material has a thermal conductivity of 1400 W/m·K or less at room temperature.
2 more elements
A device comprising:
- an active or passive component;
- a heat sink;
- and
- a thermal interface material disposed between the active or passive component and the heat sink, the thermal interface material being in direct thermal contact with the active or passive component and including boron arsenide.
1 more element
A method of forming boron arsenide, comprising:
- providing a growth substrate;
- performing one or more of melt growth, epitaxial growth of other thin films on boron arsenide or boron arsenide on other substrate, Bridgman growth of boron arsenide and vapor phase growth;
- preparing high purity and solid powders of a first precursor including boron, and a second precursor including arsenic;
- and
- exposing the growth substrate to the solid powders or vapor reactors of the first and second precursors in a reaction furnace to yield epitaxial growth of boron arsenide.
2 more elements
An electronic, optoelectronic, or photonic device having an active component comprising boron arsenide, wherein the single-crystalline boron arsenide has a thermal conductivity of 1400 W/m·K or less at room temperature.
Dependencies are inferred from the claim text.