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AssigneeResonac Corporation
InventorsYoshiyasu FURUMOTO, Susumu KAYAMA, Hisao KOGOI
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Titanium oxide particles, a method for their production, and a slurry, dispersion, composition and dielectric starting material that include the titanium oxide particles. The D90 (LD)/D50 (LD) ratio of the titanium oxide particles is greater than 1.0 and 2.0 or lower, and the particle concentration of coarse particles having a size exceeding 16 times the D50 (SEM)(16× the D50 (SEM)), for primary particles, is 20 ppm or lower. For their production, a source gas and oxidizing gas are introduced into a reaction tube and reacted, with a purge medium blowing outlet being provided on the inner wall of the reaction tube, and the blowout angle and the blowout flow velocity (B) of the purge medium from the inner wall of the reaction tube being such that the purge medium is introduced in a swirling manner along the inner wall of the reaction tube.
Titanium oxide particles, wherein the D90 (LD)/D50 (LD) ratio of the titanium oxide particles as measured by laser diffraction/scattering analysis is greater than 1.0 and 2.0 or lower, and the particle concentration of coarse particles whose primary particle size exceeds 16 times the size of D50 (SEM) of primary particles of the titanium oxide particles as observed under a field emission scanning electron microscope is 20 ppm or lower (based on the number of particles).
A method for producing titanium oxide particles wherein, for a step in which a source gas comprising titanium tetrachloride and an inert gas, and an oxidizing gas comprising either or both of oxygen gas and water vapor in addition to an inert gas, are introduced into a reaction tube and are reacted and then cooled to produce titanium oxide particles, a blowing outlet for a purge medium is provided on the inner wall of the reaction tube and the purge medium is introduced in a swirling manner along the inner wall of the reaction tube, with the blowout angle α of the purge medium from the inner wall of the reaction tube being 50° or greater with respect to a line connecting the blowing outlet of the purge medium and the center axis line of the reaction tube, on a plane projected onto a cross-section of the reaction tube that is perpendicular to the axis line of the reaction tube, and the blowout flow velocity (B) of the purge medium being 35 m/s or greater.
Dependencies are inferred from the claim text.