Actuator-sensor system and fast steering mirror (fsm) having an actuator-sensor system of this type
AssigneeMicro-Epsilon Messtechnik GmbH & Co. KG
InventorsHarald HAAS, Reinhold HOENICKA, Tobias SCHOPF, Guenter SCHALLMOSER
Life of this patent
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Abstract
An actuator-sensor system for controlled diverting or deflecting of electromagnetic radiation in at least one axis (9), with an actuator (5) for mechanically moving a deflecting element (10) and with a measuring element (2) for sensing the position of the deflecting element (10), where the measuring element (2) includes a flat substrate (3) having at least one sensor element (4). Furthermore, the present disclosure relates to a fast steering mirror (FSM).
Claims16
An actuator-sensor system for controlled diverting or deflecting of electromagnetic radiation in at least one axis (9), with an actuator (5) for mechanically moving a deflecting element (10), comprising:
- a measuring element (2) for sensing the position of the deflecting element (10),
- wherein the measuring element (2) includes a flat substrate (3) having at least one sensor element (4).
Dependencies are inferred from the claim text.