Selective monitoring of base chemicals
AssigneeECI Technology, Inc.
InventorsEugene Shalyt, Chuannan Bai, Aaron Haber
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Abstract
Methods for selective measurement and monitoring of multiple base chemicals in processing solutions are provided. Methods include providing a processing solution including a plurality of base chemicals and performing a first analytical method, such as measuring a conductivity of the solution blend, in combination with a second analytical method, such as titration or pH measurements of the solution. From such measurements, a concentration of one or more base chemicals can be selectively determined. In such methods, multiple bases in a same processing solution are advantageously selectively measured and monitored accurately.
Claims18
A method for determining a concentration of at least one base chemical in a processing solution including a first base chemical and a second base chemical, comprising:
- performing a first analytical method comprising measuring a conductivity of the processing solution to provide a first measurement;
- performing a second analytical method of the processing solution to provide a second measurement;
- and
- determining a concentration of at least one of the first base chemical and the second base chemical based on the first and second measurements,
- wherein the first base chemical is different than the second base chemical, and wherein the first analytical method is different than the second analytical method.
A method for determining a concentration of at least one base chemical in a processing solution including a hydroxide compound and an amine compound, comprising:
- performing a first analytical method comprising measuring a conductivity of the processing solution to provide a first measurement;
- performing a second analytical method of the processing solution to provide a second measurement;
- and
- determining a concentration of at least one of the hydroxide compound and the amine compound based on the first and second measurements,
- wherein the first analytical method is different than the second analytical method.
Dependencies are inferred from the claim text.