Compartmentalized sump and gas flow system for silicon ribbon production
OwnerNathan STODDARD, Parthiv DAGGOLU +2inventors
InventorsNathan STODDARD, Parthiv DAGGOLU, Alexander MARTINEZ, Peter KELLERMAN
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OwnerNathan STODDARD, Parthiv DAGGOLU +2inventors
InventorsNathan STODDARD, Parthiv DAGGOLU, Alexander MARTINEZ, Peter KELLERMAN
Estimating the term…
An apparatus for forming a crystalline ribbon grown on a surface of a melt includes an inner chamber. A crucible in the inner chamber is configured to hold a melt. A cold initializer in the inner chamber faces an exposed surface of the melt. A process gas feed is in fluid communication with a process gas inlet of the inner chamber. An outer chamber surrounds at least part of the inner chamber and defines an opening for the process gas feed and a sump inlet. A sump gas feed is in fluid communication with the sump inlet. The sump gas feed is configured to deliver a sump gas to the sump region. The sump region also can include heaters and insulation.
An apparatus for forming a crystalline ribbon grown on a surface of a melt comprising:
A method comprising:
Dependencies are inferred from the claim text.