Electrolyte and Method for Cobalt Electrodeposition
Assigneeaveni
InventorsHermine Marie Berthon, Mikailou Thiam, Dominique Suhr, Yeeseul Kim, Céline Pascale Doussot
Life of this patent
Estimating the term…
Abstract
The present invention relates to a method for fabricating cobalt interconnects and an electrolyte enabling it to be implemented. The electrolyte of pH less than 4.0 comprises cobalt ions, chloride ions and organic additives, including an alpha-hydroxy carboxylic acid and an amine chosen from polyethyleneimine or benzotriazole.
Claims18
Electrolyte for the electrodeposition of cobalt characterized in that the electrolyte is an aqueous solution comprising from 1 to 5 g/L of cobalt II ions, from 1 to 10 g/L of chloride ions, a strong acid in a sufficient quantity to obtain a pH comprised between 1.8 and 4.0, and organic additives including at least one first additive chosen from alpha-hydroxy carboxylic acids and mixtures thereof and at least one second additive chosen from polyethyleneimines and benzotriazole.
Dependencies are inferred from the claim text.